Discover our latest SMIF load port

At SEMICON Europe 2026, we will be presenting a new generation of load ports that opens up new possibilities for automated wafer handling.

The standout feature: mapping for wafers as thin as 100 µm—currently unique on the market.

The LP200-SMIF W GEN2 combines this technology with high process reliability, precise sensor technology, and comprehensive automation compatibility—developed to meet the demanding requirements of modern semiconductor manufacturing.

Precise. Reliable. Automated. Made by LIEB.

📍 Munich Exhibition | November 10–13, 2026
📌 Hall B1 | Booth 279

A solution for the next generation of semiconductor manufacturing.

Three technological highlights in one generation of load ports

The LP200-SMIF W GEN2 was developed to meet the growing demands of modern semiconductor manufacturing, with a particular focus on three areas.

• Mapping for wafers starting at 100 µm
  The GEN2 enables reliable detection of thin wafers (glass, SiC, Si, etc.) and thus supports precise, automated wafer handling.
• Alignment with the new Machinery Regulation
  The GEN2 load port was developed in accordance with the requirements of the current Machinery Regulation (EU) 2023/1230, which will replace the previous Machinery Directive in 2027.
• Safety Sensors at Performance Level D
  Safety sensors monitor, among other things, pod presence and hood position, ensuring reliable monitoring of safety-critical conditions.

As a result, the LP200-SMIF W GEN2 combines precise wafer mapping, future-oriented machine safety, and comprehensive safety sensor technology in a single generation of load ports.

Discover our new LP200-SMIF W GEN2 live at our booth at SEMICON Europe 2026.

Wafer Mapping

• Reliably detect substrates as thin as 100 µm (glass, SiC, Si, etc.)
  • Single
  • Double and
  • Cross slotted

Safe operation

•  Detection of pod presence and hood via safety sensors (Performance Level D)

Cleanliness

• ISO Class 3 or better

Technology based on experience. Development with high standards.

We have been developing and manufacturing automation solutions for demanding applications for many years.

Our strength lies in the combination of:

Engineering

Custom technical solutions for demanding applications.

Automation

Expertise in precise and reliable automated processes.

Semiconductor Expertise

Technologies tailored to the specific requirements of the semiconductor industry.

Made in Germany

Development and manufacturing with high level of expertise and vertical integration in Germany.

We don’t just develop products. We develop solutions for the demands of tomorrow.