The top priority for all components and systems that we offer and manufacture in the semiconductor sector is the safe handling of the valuable product wafers. The properties of these substrates vary greatly, from very thin and fragile to thick and from flat to heavily bent. They are as diverse as the processes involved in the manufacture of a semiconductor component.
With our fully integrated systems, we offer the option of integrating your own process module or technology into a fully automated system. With our specially developed components and modules such as end effectors, load ports and equipment front end module (EFEMs), we ensure the safe handling of all types of wafers.
