EFEM - Werner-Lieb

Equipment Front End Module (EFEM)

Are you looking for a way to load wafers into and out of your system? Then our “Equipment Front End” module is the right solution. The module can also be equipped with other different functions.

EFEM – Configuration Options

*LIEB EFEM mit LIEB LP200-SMIF Load Ports*

The following options are available for equipping the EFEM:

Load Ports
- FOUP
- SMIF
- Open wafer cassettes
End effectors (EE)
Robot
- Single arm
- Double arm
- End effector changer
EE parking station
Prealigner
ID reader
Flip station
Spin dryer
OHT option
- Light curtain
- E84
Filter fan unit

We customize the EFEM to your needs, both in terms of external dimensions and configuration. Contact us for more information.

anfrage@werner-lieb.de

Layout Beispiel eines EFEM — *LIEB EFEM with LIEB LP200-SMIF Load Ports*