Equipment Front End Module (EFEM)

Are you looking for a way to load wafers into and out of your system?

Then our “Equipment Front End” module is the right solution. The module can also be equipped with other different functions.

EFEM – Configuration Options

The following options are available for equipping the EFEM:

  • Load Ports
    • FOUP
    • SMIF
    • Open wafer cassettes
  • End effectors (EE)
  • Robot
    • Single arm
    • Double arm
    • End effector changer
  • EE parking station
  • Prealigner
  • ID reader
  • Flip station
  • Spin dryer
  • OHT option
    • Light curtain
    • E84
  • Filter fan unit
LIEB EFEM mit LIEB LP200-SMIF Load Ports
Layout Beispiel eines EFEM
LIEB EFEM with LIEB LP200-SMIF Load Ports
We customize the EFEM to your needs, both in terms of external dimensions and configuration.

Contact us for more information.

anfrage@werner-lieb.de

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