SMIF Load Ports für Reticles
LP200-SMIF WR Features
- Base plate for SMIF pods with RSP200 door
- Stainless steel enclosure
- Sensors for
- Pod placed
- Hood present
- Mask present
- mask protrusion
- 4 status LEDs
- SEMI S2, S8, E100 and E19.4-0417
- Cleanliness ISO class 3
- Made in Germany
LP200-SMIF R Features
- Compatible for RSP200 Single Mask Pods
- Stainless steel enclosure
- Sensors for
- Pod placed
- Hood present
- Mask present
- Pellicle present and orientation
- Mask protrusion
- Load port occupation for save OHT loading
- 8 status LEDs
- SEMI S2, S8, E100, E19.4-0417, E15, E100, E117
- Cleanliness ISO class 1
- CE, Made in Germany
LP200-SMIF R EUV Features
- Compatible for RSP200 Single Mask Pods and EUV Mask Pods
- Stainless steel enclosure
- Sensors for
- Pod placed
- Hood present
- Inner Pod present
- Mask present
- Pellicle present and orientation
- Mask protrusion
- Load port occupation for save OHT loading
- 8 status LEDs
- SEMI S2, S8, E100, E19.4-0417, E15, E100, E117, E152
- Cleanliness ISO class 1
- CE, Made in Germany
Do you need more information? Please contact us. We will be happy to help you.
