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SMIF Load Ports for Wafers
SMIF Load Ports for Reticles
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End Effectors
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DE
EN
Company
Our Values
Our Team
History
Markets and Products
Semiconductor
Fully Integrated Systems
EFEM
Load Ports
SMIF Load Ports for Wafers
SMIF Load Ports for Reticles
Substrat-Handling
End Effector Exchanger
End Effectors
Power Electronics
Fully Integrated Systems
Loader
Trolleys
Other Industries
Service
Career
Contact
DE
EN
SMIF Load Ports für Reticles
The LP200-SMIF WR T enables easy loading and unloading of masks in RSP200 SMIF pods.
LP200-SMIF WR Features
Base plate for SMIF pods with RSP200 door
Stainless steel enclosure
Sonsors for
Pod available
Hood available
Mask available
Mask is above
4 status LEDs
SEMI S2, S8, E100 and E19.4-0417
Cleanliness ISO class 3
Made in Germany
LP200-SMIF WR with RSP200 interface
Do you need more information? Please contact us. We will be happy to help you.
anfrage@werner-lieb.de
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