Fully Integrated Systems

With our fully integrated systems, we offer you the option of embedding your process / technology module in a fully automated wafer handling area.

Fully Integrated Systems – Configuration Options

Example layout of a fully integrated system

Existing of 2 areas

  • Rear area reserved for your process module
  • Front area for loading and unloading wafers into your process module

Can be equipped with various options

  • Load Ports
    • FOUP
    • SMIF
    • Open wafer cassettes
  • End Effektoren (EE)
  • Robot
    • Single arm
    • Double arm
  • End effector changer
  • EE parking station
  • Prealigner
  • ID reader
  • Flip station
  • spin dryer
  • EE dryer
  • OHT option
  • Filter fan unit
Design your new machine platform with us.

We customize the system according to your needs, both in terms of external dimensions and configuration.

Contact us for more information.

anfrage@werner-lieb.de

Beispiel Layout eines Vollintegrierten Systems
Example layout of a fully integrated system
This site is registered on wpml.org as a development site. Switch to a production site key to remove this banner.