With our fully integrated systems, we offer you the option of embedding your process / technology module in a fully automated wafer handling environment.
Fully Integrated Systems – Configuration Options
Existing of 2 areas
Rear area reserved for your process module
Front area for loading and unloading wafers into your process module
Can be equipped with various options
Load Ports
FOUP
SMIF
Open wafer cassettes
End Effektoren (EE)
Robot
Single arm
Double arm
End effector changer
EE parking station
Prealigner
ID reader
Flip station
spin dryer
EE dryer
OHT option
Filter fan unit
Example layout of a fully integrated system
Example layout of a fully integrated system
Design your new machine platform with us. We customize the system according to your needs, both in terms of external dimensions and configuration. Contact us for more information.
