In the area of wafer load ports, we offer the LP200-SMIF, a load port that can open and close wafer SMIF pods with an RSP200 interface.

LP200-SMIF Features

• Compatible with RSP200 SMIF wafer pods
• Wafer mapping via light barrier
• Detection of wafers in the positions
  • correctly inserted
  • cross slotted
  • double slotted
• 4 status LEDs
• SEMI E19.4-0417
• Cleanliness ISO class 3
• Made in Germany

Do you need more information? Please contact us. We will be happy to help you.

anfrage@werner-lieb.de